Year of use: December 2017
Nitrogen purity: 99.9%
Nitrogen flow rate: 165m3/h
Application industry: electronic
Purified to 99.999%, flow rate 150m3/h
Year of use: August 2010
Nitrogen purity: 99.9%
NItrogen flow rate: 77m3/h
Application industry: electronic
Purified to99.999%, flow rate 70m3/h
Year of use: March 2010
Nitrogen purity: 99.9%
Application industry: electronic
Purified to 99.999%,flow rate 70m3/h
Year of use: september 2008
Nitrogen purity: 99.99%
Nitrogen flow rate: 50m3/h
Application industry: electronic
Year of use: August 2006
Nitrogen purity: 99.9%
Nitrogen flow rate: 15m3/h
Application industry: electronic
Figure 1
Figure 2
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